Intlvac Systems

At Intlvac Thin Film, we design, engineer and manufacture a wide variety of customized systems for Thin Film PVD and Etch. Our product line ranges from small R&D/pilot project systems to large production systems utilizing processes such as Ion Beam Etching, Sputtering, Electron Beam Evaporation and Thermal Evaporation fiber-optic coating and more.

Intlvac Systems

  • Nanochrome Thin Film Deposition 

    The Nanochrome TM suite of systems are highly configurable and can be outfitted with a mix of Magnetron Sputtering and Thermal and Electron Beam Evaporation. They are typically used for Precision Optics, Electronics and MEMS / NEMS applications.

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  • Nanoquest Ion Beam Etch

    The Nanoquest is built around a direct water cooled rotating substrate. It is typically used for Ion Beam Sputtering and Etching which makes it ideal for MEMS / NEMS and Precision Optics applications.

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  • Nanoquest Ion Beam Sputter Deposition

    Ion Beam Sputter Deposition (IBSD) is a physical vapor deposition method which utilizes a remote broad ion/plasma beam source to bombard a grounded sputter target.

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  • Icarus Indium Deposition 

    The Icarus Indium Deposition System is designed to thermally evaporate high volumes of solder contact metal materials such as indium. Our geometry ensures a very flat and uniform deposition front for superior "lift-off" capability.

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  • Electra UV Sputtering 

    The Electra UV Sputtering System is the ideal thin film deposition system for prototyping and R&D. The Electra is fully customizable offering rotation, heating or cooling with optional bias during film growth. 

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  • Aegis Diamond Like Carbon

    Intlvac's Aegis DLC is a fully automated PECVD platform for DLC, Infrared ARC and other PECVD applications.

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  • PleiadesTM Cluster System

    The PleiadesTM is a cluster system designed to combine multiple Nanoquest and Nanochrome chambers. It offers a large range of applications and the possibility to combine different deposition technologies within separate chambers.

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  • MidasTM Fiber Metalization

    The MIDASTM Metalization System is designed to produce a single or multi-layer symmetrical metal coating on ends, mid spans, or windows of optical fibers for use in a hermetically sealed opto-electric package.

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  • TVAC Space Simulation

    Intlvac’s Thermal Vacuum System is a versatile space simulation system, with a large vacuum chamber designed to provide an extensive environmental test complex to simulate outer space and varying thermal conditions.

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