The PleiadesTM (Seven Sisters) Cluster System will accommodate your most demanding process requirements. With capabilities of up to 7 chambers, the PleiadesTM allows flexibility and mixing of techniques from evaporation, electron beam, magnetron sputtering, ion beam sputtering and ion beam etching.
This system allows you to maintain UHV conditions for transfer of your substrates to perform a wide range of thin film processes.
PleiadesTM is a state-of-the-art cluster system capable of producing and etching thin films of II-VI materials on up to 100mm wafers. The system's central radial distribution chamber provides access to all satellite systems with telescopic transfer arm