The PECVD for DLC system is fully automated using INTLVAC’s AUTOSYS Control System with touchscreen interface; the standard on all INTLVAC systems. This software package provides a simple, yet comprehensive graphical interface to all aspects of your system.
The DLC's unique design and processes allow for numerous consecutive coating runs before any maintenance is required to maximize your throughput. In addition, the DLC system comes complete with recipes for Infrared Anti-reflection coating of Silicon and Germanium optics.
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