The Icarus Indium Deposition System has the capacity of hundreds of depositions without the need to open the main chamber. When it is time to refill the indium, it only takes a few minutes to exchange the empty indium crucible with one that is pre-charged. Note the evolution of Intlvac's technology with superior precision and uniform deposition front.
Icarus can handle any size and shape of wafer up to 200mm in diameter with custom carriers designed to meet the need of the product. Standard carriers handle 3 x 75mm, 2 x 100mm, 1 x 150mm, with options for witness pieces and 200mm without.