Nanoquest Pico

Nanoquest Pico

The Intlvac Nanoquest Pico is the ultimate compact ion milling platform for research and development of thin film applications such as Data Storage, Spintronics, and Semiconductors. It can be configured for a number of ion sources and gases depending on your application. With its 14” D-shaped chamber and small footprint, it can fit into any lab.

The Nanoquest Pico is designed to etch small wafers and dies and is ideal for fast etching of thin films that do not respond well to conventional chemical or dry etching processes.

Nanoquest Pico brochure

Nanoquest Pico brochure

Key Benefits
nanoquest pico etch

  • Compact, low cost platform
  • Actively cooled stage
  • Substrate rotation and tilt
  • High speed vacuum pumps provide fast pump down
  • Multiple configuration options

DC or RFICP Ion Source

DC ion source

Ion Beam Planarization

ion beam planarization

Actively Cooled Stage

actively cooled stage


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