Veeco IBE/IBD 350 Combination System

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•    CX 6 Cleanroom Fa├žade and Transfer Module (1)
•    Veeco IBD350 Process Module (1)
•    Veeco IBD350 Etch Rack (1)
•    Veeco IBD350 Deposition Rack (1)
•    Veeco IBE Process Module (1)
•    Veeco IBE Process Module Rack (1)
•    Veeco Main AC Power Cabinet (1)
•    Veeco Supplementary AC Power Cabinet (1)
•    CTI 9600 Cryo Compressor (2)
•    Neslab Chiller HX 150 (1)
•    BOC Edwards Dry Pump QDP80 (3)
•    POLYCOLD PFC-1100 (1)

veeco ibe ibd

 

  

veeco ibe ibd

 

 

 

 

 

For more information about this system or creating a custom solution for your application, contact sales@intlvacthinfilm.ca or 1.800.959.5517

 

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