Veeco RF 350S Microetch

veeco rf 350s microetch


•    Category: Ion milling
•    Wafer Size: 6”
•    Ion Beam Etch System, 6”
•    Process: IBE & CAIBE
•    Load Station, 6”
•    Software Version for PM and TM: PM22.50.01
•    End Point Detection: Optical Emission and Scanview
•    Temperature: Julabo1600T Plus 1 Spare
•    Pump Stand: DRYVAC 50P, TRIVAC D65B
•    Turbo Pump: MAG2000
•    RF Generator: RFPP RF20M 2kW Plus 1 Spare
•    Gas Lines: Ar, N2, He
•    (1) Spare Grid
•    Marz 2000
•    400 V / 50 Hz
•    3 Phase
•    Manuals

veeco rf350s microetch

 

 

    

veeco rf 350s microetch

 

 

 

 

 

 

 

For more information about this system or creating a custom solution for your application, contact sales@intlvacthinfilm.ca or 1.800.959.5517

 

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